Furthermore , the etching rate , roughness versus incident laser fluences and pulse number are investigated theoretically and experimentally in detail by 3d surface analyzer . then a new priciple of pmma etched by excimer laser is given : the process is the interaction result of photodecomposition , 隨后應(yīng)用總結(jié)出的優(yōu)化加工參數(shù)在該材料上刻蝕出了寬104 m ,深56 m ,矩形度高達80 % ,底面光滑的20個循環(huán)的pcr微流控芯片。